Delivery and installation of a ICP Reactive ion etcher for silicon dielctrics

Danmarks Tekniske Universitet - DTU

DTU Nanolab wishes to acquire a high ion density source reactive ion etcher for oxides and nitrides of silicon to become its new primary instrument for 150 mm wafer processing. Delivery is expected no later than Q3 2027. The Instrument will be installed in the DTU Nanolab cleanroom - a university facility providing a comprehensive suite of micro- and nanofabrication tools. It serves a diverse community of over 200 active users, ranging from novice students to experienced researchers, as well a high percentage of commercial clients. As an open access tool, the Instrument must support the full spectrum of etching of silicon-based dielectrics, from sub 100 nm nanostructures defined by electron beam lithography to depths of several tens of microns. Meeting these demands requires exceptional process controllability and tunability: the system must perform ultra precise, low-rate etches (< 100 nm/min) with smooth and straight sidewalls and minimal undercut for shallow features, alongside high etch rate deep etches (approaching 500 nm/min). It must also accommodate all silicon dielectrics of the form SixNy, SixOx and SixOyNz, and be compatible with mask materials including Si, Cr, e-beam resists and UV/DUV photoresists with high mask selectivity for all these masking materials. The user interface must be intuitive and user friendly. The Instrument should be engineered to the highest industrial standards to minimize maintenance, and any required servicing must be straightforward and efficient. The instrument must be configured for 150 mm wafer processing and a complete kit enabling the processing of 200 mm wafers must be included in the tender as an option. Furthermore, DTU will have the option to purchase one more ICP Reactive ion etcher for silicon dielctrics identical to the initial instrument.

Deadline

Deadline 2026-11-23

Hvem? Hvad? Hvor?
Indkøbshistorik
Dato Dokument
2026-10-08 Udbudsbekendtgørelse
Udbudsbekendtgørelse (2026-10-08)
Objekt
Omfanget af udbuddet
Titel: Delivery and installation of a ICP Reactive ion etcher for silicon dielctrics
Referencenummer: 10527
Kort beskrivelse:
DTU Nanolab wishes to acquire a high ion density source reactive ion etcher for oxides and nitrides of silicon to become its new primary instrument for 150 mm wafer processing. Delivery is expected no later than Q3 2027. The Instrument will be installed in the DTU Nanolab cleanroom - a university facility providing a comprehensive suite of micro- and nanofabrication tools. It serves a diverse community of over 200 active users, ranging from novice students to experienced researchers, as well a high percentage of commercial clients. As an open access tool, the Instrument must support the full spectrum of etching of silicon-based dielectrics, from sub 100 nm nanostructures defined by electron beam lithography to depths of several tens of microns. Meeting these demands requires exceptional process controllability and tunability: the system must perform ultra precise, low-rate etches (< 100 nm/min) with smooth and straight sidewalls and minimal undercut for shallow features, alongside high etch rate deep etches (approaching 500 nm/min). It must also accommodate all silicon dielectrics of the form SixNy, SixOx and SixOyNz, and be compatible with mask materials including Si, Cr, e-beam resists and UV/DUV photoresists with high mask selectivity for all these masking materials. The user interface must be intuitive and user friendly. The Instrument should be engineered to the highest industrial standards to minimize maintenance, and any required servicing must be straightforward and efficient. The instrument must be configured for 150 mm wafer processing and a complete kit enabling the processing of 200 mm wafers must be included in the tender as an option. Furthermore, DTU will have the option to purchase one more ICP Reactive ion etcher for silicon dielctrics identical to the initial instrument.
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Kontrakttype: Varer
Produkter/tjenester: Industrimaskiner 📦
Supplerende kontrakttype: Tjenesteydelser
Beskrivelse
Intern ID: 10527
Dette udbud er også egnet for små og mellemstore virksomheder (SMV'er) ✅
Yderligere produkter/tjenester: Lasere til industriel brug 📦
Postadresse: Technical University of Denmark, NanoLab, Ørsted Plads, Building 346
Postnummer: 2800
By: Kgs. Lyngby
Land: Danmark 🇩🇰
Sted for udførelsen: Københavns omegn 🏙️
Oplysninger om valgmuligheder
Indstillinger ✅
Beskrivelse af mulighederne:
There will be an option for an upgrade kit to 200 mm wafers for the instrument and an option for one further identical instrument.
Kriterier for tildeling
Pris ✅
Pris (justeringskoefficient): 20
Kvalitetskriterium (navn): Functionality and performance
Kvalitetskriterium (vægtning): 50
Kvalitetskriterium (navn): Quality of submitted samples
Kvalitetskriterium (vægtning): 30
Titel
Partiets identifikationsnummer: LOT-0000

Procedure
Type af procedure
Åben procedure ✅
Retsgrundlag: Direktiv 2014/24/EU
Administrative oplysninger
Frist for modtagelse af bud eller ansøgninger om deltagelse: 2026-11-23 22:55:00 📅
Sprog, på hvilke bud eller ansøgninger om deltagelse kan indgives: engelsk 🗣️
Minimumsfrist, inden for hvilken tilbudsgiveren skal opretholde tilbuddet: 6 måneder
Udbudsbetingelser
Tilbudsgivere kan indgive mere end ét tilbud
Avanceret eller kvalificeret elektronisk signatur eller segl (jf forordning (EU) nr 910/2014) er påkrævet
Der kræves en garanti ✅
Elektronisk fakturering: Påkrævet
Der vil blive anvendt elektronisk betaling ✅
Frist for anmodning om yderligere oplysninger: 2026-11-12 22:55:00 📅
Kriterier for tildeling
Vægtningstype: Vægtning (procentdel, præcis)

Juridiske, økonomiske, finansielle og tekniske oplysninger
Betingelser for deltagelse
Krav om deponering og sikkerhedsstillelse:
If the supplier wishes pre-payment any such pre-payment will have to be backed by a bank guarantee. Please see draft contract.

Ordregivende myndighed
Navn og adresser
Navn: Danmarks Tekniske Universitet - DTU
Nationalt registreringsnummer: 30060946
Postadresse: Anker Engelunds Vej 1
Postnummer: 2800
Postby: Kgs. Lyngby
Region: Københavns omegn 🏙️
Land: Danmark 🇩🇰
Enhed: Mikkel Taanum
E-mail: miktaa@dtu.dk 📧
Telefon: +45 20133820 📞
URL: https://www.dtu.dk 🌏
Køberprofilens adresse: https://eu.eu-supply.com/ctm/company/companyinformation/index/165863 🌏
Den ordregivende myndigheds type
Offentligretligt organ
Hovedaktivitet
Uddannelse
Kommunikation
URL til dokumenter: https://eu.eu-supply.com/app/rfq/rwlentrance_s.asp?PID=459779&TID=200420246&B= 🌏
URL for deltagelse: https://eu.eu-supply.com/app/rfq/rwlentrance_s.asp?PID=459779&TID=200420246&B= 🌏
Elektronisk indgivelse: Påkrævet

Supplerende oplysninger
Gennemgå organ
Navn: Klagenævnet for Udbud
Nationalt registreringsnummer: 37795526
Postadresse: Nævnenes hus, Toldboden 2
Postnummer: 8800
Postby: Viborg
Region: Østjylland 🏙️
Land: Danmark 🇩🇰
E-mail: klfu@erst.dk 📧
Telefon: +45 35291000 📞
URL: http://www.klfu.dk 🌏
Tjeneste, hvorfra der kan indhentes oplysninger om klageproceduren
Navn: Konkurrence- og Forbrugerstyrelsen
Nationalt registreringsnummer: 10294819
Postadresse: Carl Jacobsens Vej 35
Postnummer: 2500
Postby: Valby
Region: Byen København 🏙️
E-mail: kfst@kfst.dk 📧
Telefon: +45 41715000 📞
URL: http://www.kfst.dk 🌏
Gennemgangsprocedure
Præcise oplysninger om fristerne for gennemgangsprocedurer:
Complaint regarding the award of a contract must be submitted no later than 45 calendar days from the date after the Contracting Authority has published a notice in the European Union Official Journal informing that the Contracting Authority has awarded/concluded a contract, cf. lov om Klagenævnet for Udbud (Complaints Board for Tenders) § 7, Section 2, no. 1.
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Oplysninger om elektroniske arbejdsgange
Elektronisk fakturering vil blive accepteret
Kilde: OJS 2026/S 197-701524 (2026-10-08)
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