Delivery and installation of a High ion density etcher for lithium niobate on insulator - LiNb03 (LN)

Danmarks Tekniske Universitet - DTU

DTU Nanolab wishes to acquire a high ion density source reactive ion etcher for etching lithium niobate on insulator 150 mm wafer processing. Delivery is expected no later than Q4 2027. We are looking for a highly versatile instrument providing stable etch recipes, capable of etching at both nanometer scale and micrometer scale with precise control of etching depth, typically a few hundreds of nm. The instrument must have state-of-the-art performance in terms of profile control, uniformity, selectivity, and in particu-lar etching sidewall smoothness to achieve low waveguide loss. The Instrument will be installed in the DTU Nanolab cleanroom - a university facility providing a comprehensive suite of micro- and nanofabrication tools. It serves a diverse community of over 200 active users, ranging from novice students to experienced researchers, as well a high percentage of commercial clients. At DTU Nanolab there are several research groups and companies working on developing and running small scale production of optical devises on the tools. Therefor the capability of etching smooth optical waveguide, gratings and other low-roughness optical devises are of high importance to us.

Deadline

Deadline 2026-10-15

Hvem? Hvad? Hvor?
Indkøbshistorik
Dato Dokument
2026-09-10 Udbudsbekendtgørelse
Udbudsbekendtgørelse (2026-09-10)
Objekt
Omfanget af udbuddet
Titel: Delivery and installation of a High ion density etcher for lithium niobate on insulator - LiNb03 (LN)
Referencenummer: 10528
Kort beskrivelse:
DTU Nanolab wishes to acquire a high ion density source reactive ion etcher for etching lithium niobate on insulator 150 mm wafer processing. Delivery is expected no later than Q4 2027. We are looking for a highly versatile instrument providing stable etch recipes, capable of etching at both nanometer scale and micrometer scale with precise control of etching depth, typically a few hundreds of nm. The instrument must have state-of-the-art performance in terms of profile control, uniformity, selectivity, and in particu-lar etching sidewall smoothness to achieve low waveguide loss. The Instrument will be installed in the DTU Nanolab cleanroom - a university facility providing a comprehensive suite of micro- and nanofabrication tools. It serves a diverse community of over 200 active users, ranging from novice students to experienced researchers, as well a high percentage of commercial clients. At DTU Nanolab there are several research groups and companies working on developing and running small scale production of optical devises on the tools. Therefor the capability of etching smooth optical waveguide, gratings and other low-roughness optical devises are of high importance to us.
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Kontrakttype: Varer
Produkter/tjenester: Industrimaskiner 📦
Supplerende kontrakttype: Tjenesteydelser
Beskrivelse
Intern ID: 10528
Dette udbud er også egnet for små og mellemstore virksomheder (SMV'er) ✅
Yderligere oplysninger:
General information on participation in the procurement procedure: Participation in the procurement procedure may only take place electronically via the Contracting Authority’s electronic procurement system. To gain access to the procurement documents, the tenderer must be registered or register as a user. If the procurement documents contain multiple versions of the same document, the most recently uploaded version shall prevail. All communication in connection with the procurement procedure, including questions and answers, must take place via the electronic procurement system. Questions must be submitted in due time to enable the Contracting Authority to obtain the necessary information and provide responses no later than six days before the expiry of the tender deadline. Questions received later than six days before the deadline cannot be expected to be answered unless the deadline is simultaneously extended. Interested parties are encouraged to keep themselves informed via the electronic procurement system. If the applicant experiences technical issues with the system, support may be contacted via email at dksupport@eu-supply.com or by telephone at (+45) 70 20 80 14. The tenderer must submit an ESPD as preliminary documentation for the matters referred to in the Danish Public Procurement Act. It is not necessary for the tenderer to sign the ESPD. Prior to the award decision, the tenderer that the Contracting Authority intends to award the contract to must provide documentation for the information stated in the ESPD in accordance with sections 151–152 of the Danish Public Procurement Act, cf. section 153. As an alternative to the documentation referred to in sections 153–155, 157 and 158 of the Danish Public Procurement Act, the tenderer may submit a certificate of registration on an official list of approved economic operators, cf. section 156, issued by the competent authority. The Contracting Authority may only accept such certificates from tenderers established in the country that maintains the official list. Language: All correspondence relating to the procurement must be in English. Tenders must be submitted in English. The final contract will be concluded in English. The Contracting Authority may apply the procedure set out in section 159(5) of the Danish Public Procurement Act if the tender does not comply with the formal requirements set out in the procurement documents. Please note that the procurement is covered by Article 5k of Council Regulation (EU) No 833/2014, as amended. This provision contains a prohibition against awarding contracts to Russian companies and companies under Russian control, etc. (see Article 5k(1) for the precise definition of the entities covered by the prohibition). The Contracting Authority reserves the right at any time during the procurement procedure to request documentation that the economic operators are not covered by the prohibition, for example by requiring a declaration to that effect and/or documentation regarding the place of establishment and ownership structure of the operators, as well as any subcontractors.
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Yderligere produkter/tjenester:
Postadresse: Technical University of Denmark, NanoLab, Ørsted Plads, Building 347
Postnummer: 2800
By: Kgs. Lyngby
Land: Danmark 🇩🇰
Sted for udførelsen: Nordsjælland 🏙️
Kriterier for tildeling
Pris ✅
Pris (justeringskoefficient): 20
Kvalitetskriterium (navn): Quality, Functionality and Performance
Kvalitetskriterium (vægtning): 80
Titel
Partiets identifikationsnummer: LOT-0000

Procedure
Type af procedure
Åben procedure ✅
Retsgrundlag: Direktiv 2014/24/EU
Administrative oplysninger
Frist for modtagelse af bud eller ansøgninger om deltagelse: 2026-10-15 21:55:00 📅
Sprog, på hvilke bud eller ansøgninger om deltagelse kan indgives: engelsk 🗣️
Minimumsfrist, inden for hvilken tilbudsgiveren skal opretholde tilbuddet: 90 dage
Udbudsbetingelser
Tilbudsgivere kan indgive mere end ét tilbud
Avanceret eller kvalificeret elektronisk signatur eller segl (jf forordning (EU) nr 910/2014) er påkrævet
Elektronisk fakturering: Tilladt
Der vil blive anvendt elektronisk bestilling ✅
Der vil blive anvendt elektronisk betaling ✅
Frist for anmodning om yderligere oplysninger: 2026-10-08 10:00:00 📅
Kriterier for tildeling
Vægtningstype: Vægtning (procentdel, præcis)
Udbudsbetingelser
Kontrakten indeholder gennemførelsesbetingelser ✅

Juridiske, økonomiske, finansielle og tekniske oplysninger
Betingelser for deltagelse
Udvælgelseskriterium: Referencer på specificerede tjenester
Liste og kortfattet beskrivelse af regler og kriterier:
The Tenderer must show that it has the technical and professional ability to fulfil the contract. The Ten-derer must demonstrate this by providing at least 3 relevant references for comparable agreements, showing that the Tenderer has previously delivered, installed and serviced a High ion density plasma etcher for etching of lithium niobate on insulator, substantially equivalent to the Instrument. The agreement, to which the reference refers, must not be more than 5 years old. The date is calculated from the last delivery date of the machine under the agreement in the reference.
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Betingelser i forbindelse med kontrakten
Betingelser for opfyldelse af kontrakten: Please see the draft agreement which is part of the tender material.

Ordregivende myndighed
Navn og adresser
Navn: Danmarks Tekniske Universitet - DTU
Nationalt registreringsnummer: 30060946
Postadresse: Anker Engelunds Vej 1
Postnummer: 2800
Postby: Kgs. Lyngby
Region: Nordsjælland 🏙️
Land: Danmark 🇩🇰
Enhed: Mikkel Taanum
E-mail: miktaa@dtu.dk 📧
Telefon: +45 20133820 📞
URL: https://www.dtu.dk 🌏
Køberprofilens adresse: https://eu.eu-supply.com/ctm/company/companyinformation/index/165863 🌏
Den ordregivende myndigheds type
Offentligretligt organ
Hovedaktivitet
Uddannelse
Kommunikation
URL til dokumenter: https://eu.eu-supply.com/app/rfq/rwlentrance_s.asp?PID=459768&TID=200420236&B= 🌏
URL for deltagelse: https://eu.eu-supply.com/app/rfq/rwlentrance_s.asp?PID=459768&TID=200420236&B= 🌏
Elektronisk indgivelse: Påkrævet

Supplerende oplysninger
Yderligere oplysninger
General information on participation in the procurement procedure: Participation in the procurement procedure may only take place electronically via the Contracting Authority’s electronic procurement system. To gain access to the procurement documents, the tenderer must be registered or register as a user. If the procurement documents contain multiple versions of the same document, the most recently uploaded version shall prevail. All communication in connection with the procurement procedure, including questions and answers, must take place via the electronic procurement system. Questions must be submitted in due time to enable the Contracting Authority to obtain the necessary information and provide responses no later than six days before the expiry of the tender deadline. Questions received later than six days before the deadline cannot be expected to be answered unless the deadline is simultaneously extended. Interested parties are encouraged to keep themselves informed via the electronic procurement system. If the applicant experiences technical issues with the system, support may be contacted via email at dksupport@eu-supply.com or by telephone at (+45) 70 20 80 14. The tenderer must submit an ESPD as preliminary documentation for the matters referred to in the Danish Public Procurement Act. It is not necessary for the tenderer to sign the ESPD. Prior to the award decision, the tenderer that the Contracting Authority intends to award the contract to must provide documentation for the information stated in the ESPD in accordance with sections 151–152 of the Danish Public Procurement Act, cf. section 153. As an alternative to the documentation referred to in sections 153–155, 157 and 158 of the Danish Public Procurement Act, the tenderer may submit a certificate of registration on an official list of approved economic operators, cf. section 156, issued by the competent authority. The Contracting Authority may only accept such certificates from tenderers established in the country that maintains the official list. Language: All correspondence relating to the procurement must be in English. Tenders must be submitted in English. The final contract will be concluded in English. The Contracting Authority may apply the procedure set out in section 159(5) of the Danish Public Procurement Act if the tender does not comply with the formal requirements set out in the procurement documents. Please note that the procurement is covered by Article 5k of Council Regulation (EU) No 833/2014, as amended. This provision contains a prohibition against awarding contracts to Russian companies and companies under Russian control, etc. (see Article 5k(1) for the precise definition of the entities covered by the prohibition). The Contracting Authority reserves the right at any time during the procurement procedure to request documentation that the economic operators are not covered by the prohibition, for example by requiring a declaration to that effect and/or documentation regarding the place of establishment and ownership structure of the operators, as well as any subcontractors.
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Gennemgå organ
Navn: Klagenævnet for Udbud
Nationalt registreringsnummer: 37795526
Postadresse: Nævnenes hus, Toldboden 2
Postnummer: 8800
Postby: Viborg
Region: Østjylland 🏙️
Land: Danmark 🇩🇰
E-mail: klfu@erst.dk 📧
Telefon: +45 35291000 📞
URL: http://www.klfu.dk 🌏
Tjeneste, hvorfra der kan indhentes oplysninger om klageproceduren
Navn: Konkurrence- og Forbrugerstyrelsen
Nationalt registreringsnummer: 10294819
Postadresse: Carl Jacobsens Vej 35
Postnummer: 2500
Postby: Valby
Region: Byen København 🏙️
E-mail: kfst@kfst.dk 📧
Telefon: +45 41715000 📞
URL: http://www.kfst.dk 🌏
Gennemgangsprocedure
Præcise oplysninger om fristerne for gennemgangsprocedurer:
Complaint regarding the award of a contract must be submitted no later than 45 calendar days from the date after the Contracting Authority has published a notice in the European Union Official Journal informing that the Contracting Authority has awarded/concluded a contract, cf. lov om Klagenævnet for Udbud (Complaints Board for Tenders) § 7, Section 2, no. 1.
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Oplysninger om elektroniske arbejdsgange
Elektronisk fakturering vil blive accepteret
Kilde: OJS 2026/S 176-628101 (2026-09-10)
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