Scanning Electron Microscope

Danmarks Tekniske Universitet - DTU

This tender concerns the acquisition of a scanning electron microscope (SEM) for a university facility that provides access to an extensive suite of nanofabrication and characterization tools as one of its core purposes.

Deadline

Fristen for modtagelse af bud var på 2022-08-31. Indkøbet blev offentliggjort på 2022-07-04.

Leverandører

Følgende leverandører er nævnt i tildelingsbeslutninger eller andre indkøbsdokumenter:

Hvem? Hvad? Hvor?
Indkøbshistorik
Dato Dokument
2022-07-04 Udbudsbekendtgørelse
2022-10-05 Bekendtgørelse om indgåede kontrakter
Udbudsbekendtgørelse (2022-07-04)
Objekt
Omfanget af udbuddet
Titel: Elektronmikroskoper
Kort beskrivelse:
This tender concerns the acquisition of a scanning electron microscope (SEM) for a university facility that provides access to an extensive suite of nanofabrication and characterization tools as one of its core purposes.
Bekendtgørelsens metadata
Originalsprog: engelsk 🗣️
Dokumenttype: Udbudsbekendtgørelse
Kontraktens art: Varer
Forordning: Den Europæiske Union, med deltagelse af GPA-lande
Fælles glossar for offentlige kontrakter (CPV)
Kode: Elektronmikroskoper 📦
Yderligere CPV-kode: Laboratorieudstyr, optisk udstyr og præcisionsudstyr (ikke briller) 📦
Sted for udførelsen
NUTS-region: Hovedstaden 🏙️

Procedure
Procedureform: Offentligt udbud
Bud-type: Indsendelse gældende for alle delaftaler
Kriterier for tildeling
Det økonomisk mest fordelagtige bud

Ordregivende myndighed
Identitet
Land: Danmark 🇩🇰
Type af ordregivende myndighed: Offentligretligt organ
Navn på ordregivende myndighed: Danmarks Tekniske Universitet - DTU
Postadresse: Anker Engelunds Vej 1
Postnummer: 2800
Postby: Kgs. Lyngby
Kontakt
Internetadresse: http://www.dtu.dk 🌏
E-mail: dafaj@dtu.dk 📧
Telefon: +45 93596840 📞
URL til dokumenter: http://eu.eu-supply.com/app/rfq/rwlentrance_s.asp?PID=335844&B=DTU 🌏
URL til deltagelse: http://eu.eu-supply.com/app/rfq/rwlentrance_s.asp?PID=335844&B=DTU 🌏

Reference
Datoer
Afsendelsesdato: 2022-07-04 📅
Tilbudsfrist: 2022-08-31 📅
Offentliggørelsesdato: 2022-07-08 📅
Identifikatorer
Bekendtgørelsesnummer: 2022/S 130-367557
EUT-S-nummer: 130

Objekt
Omfanget af udbuddet
Anslået samlet værdi: 500 000 EUR 💰
Kort beskrivelse:
This tender concerns the acquisition of a scanning electron microscope (SEM) for a university facility that provides access to an extensive suite of nanofabrication and characterisation tools as one of its core purposes.
The SEM will be a much needed upgrade of the current SEM capability in the lab. As such, only a high-end instrument with a field emission source offering high emission at low energy spread will be able to provide the necessary the state-of the art lateral image resolution of 0.8 nm or better at 15 kV acceleration voltage and 0.9 nm or better at 1 kV acceleration voltage (with no beam deceleration/sample bias applied) using the in-column SE detector.
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As the SEM will cover the most challenging applications in the lab, the list of requirements that need to be met is very extensive. Firstly, the performance at low acceleration voltages must be particularly good as this mode of operation is crucially important for a vast number of applications. Likewise, to ensure ideal imaging conditions free of hydrocarbon contamination, the chamber must be equipped with a chamber-mounted plasma cleaner and if possible, a fully integrated airlock system to increase sample throughput.
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Secondly, the instrument must also host a broad selection of advanced electron detectors in addition to the standard in-chamber and in-column secondary electron (SE) detectors for high vacuum conditions. For instance, to qualify subtle material contrast differences, we need in-column energy selective detection of backscatter electrons (BSE's) emerging from completely non-conducting samples that traditionally requires some kind of capability to efficiently suppress the build-up of charges produced by the imaging process. To qualify the same kind of samples we need the alternative imaging path provided by the chamber-mounted (preferably retractable) BSE detector with annular diode detectors.
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Thirdly, to address an increasing number of applications relying on the precise manufacturing of ultra-thin membranes, our characterisation capability will improve dramatically with an annular STEM detector for high-resolution transmission measurements.
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Finally, we have a strong need to upgrade our ability to characterize nano-structures defined by electron beam lithography. The world-class performance of our E-Beam writer is simply not matched by our current SEM characterisation capability. The situation is especially challenging for line edge roughness measurements of sub 20 nanometre E-beam resist structures deposited onto 150 mm diameter non-conducting substrates. The SEM must have a solution for this application that does not require any kind of sample coating in order to reduce sample charging but delivers the required image resolution.
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Anslået værdi uden moms: 500 000 EUR 💰
Varighed: 48 måneder
Beskrivelse af mulighederne:
Option 1: Electrostatic beam blanker, cf. Appendix 1 – Requirement Specification (2.17).
Option 2: Airlock, cf. Appendix 1 – Requirement Specification (2.18).
Option 3: Protection from external noise, cf. Appendix 1 – Requirement Specification (2.19).
Option 4: Correlative microscopy, cf. Appendix 1 – Requirement Specification (2.27).
Option 5: Offline image analysis, cf. Appendix 1 – Requirement Specification (2.28).
Minimum Option: Service contract, cf. Appendix 1 – Requirement Specification (5.3).

Juridiske, økonomiske, finansielle og tekniske oplysninger
Betingelser for deltagelse
Mindstekrav til niveauet:
For the last 3 audited financial years, as a minimum the Tenderer must on average have had a:
- Yearly net turnover of EUR 950.000.
If the Tenderer cannot comply with the required figures for financial standing, the Tenderer can document their financial standing by sending an on-demand guarantee from a bank or similar with a value of EUR 950.000.
As a minimum the Tenderer must provide 5 references for comparable agreements.
Comparable agreements mean agreements with a value of at least EUR 470.000 concerning the acquisition of a high-end scanning electron microscope. The agreement, to which the reference refers, must not be more than 3 years old. The date is calculated from the last signature on the agreement referred to.
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Procedure
Retsgrundlag: 32014L0024
Tidspunkt for modtagelse af tilbud: 12:00
Sprog, på hvilke bud eller ansøgninger om deltagelse kan indgives: engelsk 🗣️
Dato for åbning af tilbud: 2022-08-31 📅
Tidspunkt for åbning af tilbud: 12:00

Ordregivende myndighed
Identitet
Nationalt registreringsnummer: 30060946
Kontakt
Enhed: David Fajnzylber
Køberprofilens adresse: https://eu.eu-supply.com/ctm/Company/CompanyInformation/Index/165863 🌏
URL til dokumenter: http://eu.eu-supply.com/app/rfq/rwlentrance_s.asp?PID=335844&B=DTU 🌏

Supplerende oplysninger
Gennemgå organ
Navn: Klagenævnet for Udbud
Postadresse: Nævnenes hus, Toldboden 2
Postby: Viborg
Postnummer: 8800
Land: Danmark 🇩🇰
Telefon: +45 35291000 📞
E-mail: klfu@erst.dk 📧
Internetadresse: http://www.klfu.dk 🌏
Oplysninger om frister for klageprocedurer:
Complaint regarding the award of a contract must be submitted no later than 45 calendar days from the date after the Contracting Authority has published a notice in the European Union Official Journal informing that the Contracting Authority has awarded/concluded a contract, cf. lov om Klagenævnet for Udbud (Complaints Board for Tenders) § 7, Section 2, no. 1.
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Tjeneste, hvorfra der kan indhentes oplysninger om klageproceduren
Navn: Konkurrence- og Forbrugerstyrelsen
Postadresse: Carl Jacobsens Vej 35
Postby: Valby
Postnummer: 2500
Telefon: +45 41715000 📞
E-mail: kfst@kfst.dk 📧
Internetadresse: http://www.kfst.dk 🌏
Kilde: OJS 2022/S 130-367557 (2022-07-04)
Bekendtgørelse om indgåede kontrakter (2022-10-05)
Objekt
Omfanget af udbuddet
Den samlede værdi af udbuddet: 4 182 931 DKK 💰
Bekendtgørelsens metadata
Originalsprog: dansk 🗣️
Dokumenttype: Bekendtgørelse om indgåede kontrakter

Procedure
Bud-type: Finder ikke anvendelse

Reference
Datoer
Afsendelsesdato: 2022-10-05 📅
Offentliggørelsesdato: 2022-10-10 📅
Identifikatorer
Bekendtgørelsesnummer: 2022/S 195-552647
Henviser til bekendtgørelse: 2022/S 130-367557
EUT-S-nummer: 195

Objekt
Omfanget af udbuddet
Beskrivelse af mulighederne:
- Exchanging Navigation Camera (item 10)
- Exchanging Air cooled chiller (item 20)
- Exchanging from ZEN Core version (item 25)
- 200mm Airlock Kit NSE (item 30)
- 6” Wafer holder f/160mm airlock (item 40)
- Buffer Pre-vacuum Quiet Mode NSE (item 60)

Procedure
Kriterier for tildeling
Kvalitetskriterium (navn): Quality and functionality
Kvalitetskriterium (vægtning): 45
Kvalitetskriterium (navn): Service
Kvalitetskriterium (vægtning): 15
Pris (justeringskoefficient): 40

Tildeling af kontrakt
Dato for kontraktindgåelse: 2022-09-28 📅
Navn: Zeiss
Nationalt registreringsnummer: Carl Zeiss A/S
Postadresse: Bregnerødvej 122
Postby: Birkerød
Postnummer: 3460
Land: Danmark 🇩🇰
E-mail: liza.schioenning@zeiss.com 📧
Land: Hovedstaden 🏙️
Den samlede værdi af udbuddet: 4 182 931 DKK 💰
Oplysninger om udbud
Antal modtagne bud: 3
Kilde: OJS 2022/S 195-552647 (2022-10-05)
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Region:
Danmark Danmark Hovedstaden
Produkter/tjenester:
Laboratorieudstyr, optisk udstyr og... Apparatur til kontrol og prøvning Mikroskoper Elektronmikroskoper