This tender concerns the acquisition of a scanning electron microscope (SEM) for a university facility that provides access to an extensive suite of nanofabrication and characterization tools as one of its core purposes.
Deadline
Fristen for modtagelse af bud var på 2022-08-31.
Indkøbet blev offentliggjort på 2022-07-04.
Leverandører
Følgende leverandører er nævnt i tildelingsbeslutninger eller andre indkøbsdokumenter:
Objekt Omfanget af udbuddet
Titel: Scanning Electron Microscope
Produkter/tjenester: Elektronmikroskoper📦
Kort beskrivelse:
“This tender concerns the acquisition of a scanning electron microscope (SEM) for a university facility that provides access to an extensive suite of...”
Kort beskrivelse
This tender concerns the acquisition of a scanning electron microscope (SEM) for a university facility that provides access to an extensive suite of nanofabrication and characterization tools as one of its core purposes.
1️⃣
Yderligere produkter/tjenester: Laboratorieudstyr, optisk udstyr og præcisionsudstyr (ikke briller)📦
Sted for udførelsen: Hovedstaden🏙️
Beskrivelse af udbuddet:
“This tender concerns the acquisition of a scanning electron microscope (SEM) for a university facility that provides access to an extensive suite of...”
Beskrivelse af udbuddet
This tender concerns the acquisition of a scanning electron microscope (SEM) for a university facility that provides access to an extensive suite of nanofabrication and characterisation tools as one of its core purposes.
The SEM will be a much needed upgrade of the current SEM capability in the lab. As such, only a high-end instrument with a field emission source offering high emission at low energy spread will be able to provide the necessary the state-of the art lateral image resolution of 0.8 nm or better at 15 kV acceleration voltage and 0.9 nm or better at 1 kV acceleration voltage (with no beam deceleration/sample bias applied) using the in-column SE detector.
As the SEM will cover the most challenging applications in the lab, the list of requirements that need to be met is very extensive. Firstly, the performance at low acceleration voltages must be particularly good as this mode of operation is crucially important for a vast number of applications. Likewise, to ensure ideal imaging conditions free of hydrocarbon contamination, the chamber must be equipped with a chamber-mounted plasma cleaner and if possible, a fully integrated airlock system to increase sample throughput.
Secondly, the instrument must also host a broad selection of advanced electron detectors in addition to the standard in-chamber and in-column secondary electron (SE) detectors for high vacuum conditions. For instance, to qualify subtle material contrast differences, we need in-column energy selective detection of backscatter electrons (BSE's) emerging from completely non-conducting samples that traditionally requires some kind of capability to efficiently suppress the build-up of charges produced by the imaging process. To qualify the same kind of samples we need the alternative imaging path provided by the chamber-mounted (preferably retractable) BSE detector with annular diode detectors.
Thirdly, to address an increasing number of applications relying on the precise manufacturing of ultra-thin membranes, our characterisation capability will improve dramatically with an annular STEM detector for high-resolution transmission measurements.
Finally, we have a strong need to upgrade our ability to characterize nano-structures defined by electron beam lithography. The world-class performance of our E-Beam writer is simply not matched by our current SEM characterisation capability. The situation is especially challenging for line edge roughness measurements of sub 20 nanometre E-beam resist structures deposited onto 150 mm diameter non-conducting substrates. The SEM must have a solution for this application that does not require any kind of sample coating in order to reduce sample charging but delivers the required image resolution.
Vis mere Kriterier for tildeling
Prisen er ikke det eneste tildelingskriterium, og alle kriterier er kun anført i udbudsdokumenterne
Omfanget af udbuddet
Anslået samlet værdi ekskl. moms: EUR 500 000 💰
Kontraktens, rammeaftalens eller det dynamiske indkøbssystems varighed
Nedenstående tidsramme er udtrykt i antal måneder.
Beskrivelse
Varighed: 48
Oplysninger om valgmuligheder
Indstillinger ✅
Beskrivelse af mulighederne:
“Option 1: Electrostatic beam blanker, cf. Appendix 1 – Requirement Specification (2.17).
Option 2: Airlock, cf. Appendix 1 – Requirement Specification...”
Juridiske, økonomiske, finansielle og tekniske oplysninger Betingelser for deltagelse
“For the last 3 audited financial years, as a minimum the Tenderer must on average have had a:
- Yearly net turnover of EUR 950.000.
If the Tenderer cannot...”
For the last 3 audited financial years, as a minimum the Tenderer must on average have had a:
- Yearly net turnover of EUR 950.000.
If the Tenderer cannot comply with the required figures for financial standing, the Tenderer can document their financial standing by sending an on-demand guarantee from a bank or similar with a value of EUR 950.000.
Vis mere
Betingelser for deltagelse (tekniske og faglige kvalifikationer):
“As a minimum the Tenderer must provide 5 references for comparable agreements.
Comparable agreements mean agreements with a value of at least EUR 470.000...”
Betingelser for deltagelse (tekniske og faglige kvalifikationer)
As a minimum the Tenderer must provide 5 references for comparable agreements.
Comparable agreements mean agreements with a value of at least EUR 470.000 concerning the acquisition of a high-end scanning electron microscope. The agreement, to which the reference refers, must not be more than 3 years old. The date is calculated from the last signature on the agreement referred to.
Procedure Type af procedure
Åben procedure
Administrative oplysninger
Frist for modtagelse af bud eller ansøgninger om deltagelse: 2022-08-31
12:00 📅
Sprog, på hvilke bud eller ansøgninger om deltagelse kan indgives: engelsk 🗣️
Betingelser for åbning af buddene: 2022-08-31
12:00 📅
Supplerende oplysninger Oplysninger om gentagelse
Der er tale om et tilbagevendende indkøb ✅ Gennemgå organ
Navn: Klagenævnet for Udbud
Postadresse: Nævnenes hus, Toldboden 2
Postby: Viborg
Postnummer: 8800
Land: Danmark 🇩🇰
Telefon: +45 35291000📞
E-mail: klfu@erst.dk📧
URL: http://www.klfu.dk🌏 Gennemgangsprocedure
Præcise oplysninger om fristerne for gennemgangsprocedurer:
“Complaint regarding the award of a contract must be submitted no later than 45 calendar days from the date after the Contracting Authority has published a...”
Præcise oplysninger om fristerne for gennemgangsprocedurer
Complaint regarding the award of a contract must be submitted no later than 45 calendar days from the date after the Contracting Authority has published a notice in the European Union Official Journal informing that the Contracting Authority has awarded/concluded a contract, cf. lov om Klagenævnet for Udbud (Complaints Board for Tenders) § 7, Section 2, no. 1.
Vis mere Tjeneste, hvorfra der kan indhentes oplysninger om klageproceduren
Navn: Konkurrence- og Forbrugerstyrelsen
Postadresse: Carl Jacobsens Vej 35
Postby: Valby
Postnummer: 2500
Land: Danmark 🇩🇰
Telefon: +45 41715000📞
E-mail: kfst@kfst.dk📧
URL: http://www.kfst.dk🌏
Kilde: OJS 2022/S 130-367557 (2022-07-04)
Bekendtgørelse om indgåede kontrakter (2022-10-05) Objekt Omfanget af udbuddet
Samlet værdi af indkøbsaftalen (ekskl. moms): DKK 4 182 931 💰
Kriterier for tildeling
Kvalitetskriterium (navn): Quality and functionality
Kvalitetskriterium (vægtning): 45
Kvalitetskriterium (navn): Service
Kvalitetskriterium (vægtning): 15
Pris (justeringskoefficient): 40
Oplysninger om valgmuligheder
Beskrivelse af mulighederne:
“- Exchanging Navigation Camera (item 10)
- Exchanging Air cooled chiller (item 20)
- Exchanging from ZEN Core version (item 25)
- 200mm Airlock Kit NSE...”
Beskrivelse af mulighederne
- Exchanging Navigation Camera (item 10)
- Exchanging Air cooled chiller (item 20)
- Exchanging from ZEN Core version (item 25)
- 200mm Airlock Kit NSE (item 30)
- 6” Wafer holder f/160mm airlock (item 40)
- Buffer Pre-vacuum Quiet Mode NSE (item 60)
Procedure Administrative oplysninger
Tidligere offentliggørelse vedrørende denne procedure: 2022/S 130-367557
Tildeling af kontrakt
1️⃣
Kontraktnummer: 1
Titel: Scanning Electron Microscope
Dato for indgåelse af kontrakten: 2022-09-28 📅
Oplysninger om udbud
Antal modtagne bud: 3
Antal bud, der er modtaget ad elektronisk vej: 3
Navn og adresse på kontrahenten
Navn: Zeiss
Nationalt registreringsnummer: Carl Zeiss A/S
Postadresse: Bregnerødvej 122
Postby: Birkerød
Postnummer: 3460
Land: Danmark 🇩🇰
E-mail: liza.schioenning@zeiss.com📧
Region: Hovedstaden🏙️
Entreprenøren er en SMV
Oplysninger om kontraktens/parcellens værdi (ekskl. moms)
Kontraktens/parcellens samlede værdi: DKK 4 182 931 💰
Kilde: OJS 2022/S 195-552647 (2022-10-05)