Nylige indkøb, hvor leverandøren Picosun Oy er nævnt
2015-09-14Plasma Thermal ALD System (Danmarks Tekniske Universitet — DTU)
This tender is concerning a combined plasma/thermal Atomic Layer Deposition system (p/t-ALD) for research applications with focus on high flexibility regarding source materials (metals and dielectrics), substrate materials and sizes. It should be possible to deposit metal oxides, metal nitrides and pure metal thin films in ALD-mode. The plasma source should be located in a remote position with respect to the substrate (substrate located ‘down-stream’). It must be possible to run the precursors …
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